X-RAY METROLOGY IN SEMICONDUCTOR MANUFACTURING
By: Bowen,D. Keith.
Contributor(s): Tanner,Brian K.
Material type:
BookPublisher: Crc Press, Boca Raton 2006Description: 277.ISBN: 0849339286.Subject(s): Semiconductors -- Design And Construction -- Quality Control | Integrated Circuits -- Measurement | Semiconductor Wafers -- InspectionDDC classification: 621.38152 | B675X
| Item type | Current location | Collection | Call number | url | Status | Date due | Barcode | Item holds |
|---|---|---|---|---|---|---|---|---|
Books
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PK Kelkar Library, IIT Kanpur | COMPACT STORAGE (BASEMENT) | 621.38152 B675X (Browse shelf) | Book Request | Available | A155172 |
Total holds: 0
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