000 -LEADER |
fixed length control field |
00592pam a2200193a 44500 |
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
fixed length control field |
160408b2006 xxu||||| |||| 00| 0 eng d |
020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
International Standard Book Number |
0849339286 |
082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER |
Classification number |
621.38152 |
Item number |
B675X |
100 ## - MAIN ENTRY--PERSONAL NAME |
Personal name |
Bowen,D. Keith |
245 1# - TITLE STATEMENT |
Title |
X-RAY METROLOGY IN SEMICONDUCTOR MANUFACTURING |
260 ## - PUBLICATION, DISTRIBUTION, ETC. |
Place of publication, distribution, etc. |
|
Name of publisher, distributor, etc. |
Crc Press, Boca Raton |
Date of publication, distribution, etc. |
2006 |
300 ## - PHYSICAL DESCRIPTION |
Extent |
277 |
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
Topical term or geographic name entry element |
Semiconductors -- Design And Construction -- Quality Control |
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
Topical term or geographic name entry element |
Integrated Circuits -- Measurement |
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
Topical term or geographic name entry element |
Semiconductor Wafers -- Inspection |
700 ## - ADDED ENTRY--PERSONAL NAME |
Personal name |
Tanner,Brian K. |
964 ## - |
-- |
CIRC |
997 ## - |
-- |
A155172 s C |