621.38152 / B675X
Bowen,D. Keith
X-RAY METROLOGY IN SEMICONDUCTOR MANUFACTURING / .- Crc Press, Boca Raton, 2006 .- 277 .
ISBN: 0849339286
Subject Headings:
Semiconductors -- Design And Construction -- Quality Control;
Integrated Circuits -- Measurement;
Semiconductor Wafers -- Inspection;
Author Added Entry:
Tanner,Brian K.;
Copy Details:
Acc. No.: A155172, Full Call No.: 621.38152 B675X, Item type: Books , Location: COMPACT STORAGE (BASEMENT),
------------------------- --------------------- ------ --------- ------- ------- --------- --------
Bowen,D. Keith
X-RAY METROLOGY IN SEMICONDUCTOR MANUFACTURING / .- Crc Press, Boca Raton, 2006 .- 277 .
ISBN: 0849339286
Subject Headings:
Semiconductors -- Design And Construction -- Quality Control;
Integrated Circuits -- Measurement;
Semiconductor Wafers -- Inspection;
Author Added Entry:
Tanner,Brian K.;
Copy Details:
Acc. No.: A155172, Full Call No.: 621.38152 B675X, Item type: Books , Location: COMPACT STORAGE (BASEMENT),
------------------------- --------------------- ------ --------- ------- ------- --------- --------