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Handbook of cleaning for semiconductor manufacturing : fundamentals and applications

By: Reinhardt, Karen A.
Contributor(s): Reidy, Richard F.
Material type: materialTypeLabelBookPublisher: New Jersey John Wiley & Sons 2011Description: xxii, 590p.ISBN: 9780470625958.Subject(s): Semiconductors OptoelectronicsDDC classification: 621.38152 | R275h
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Item type Current location Collection Call number Status Date due Barcode Item holds
Books Books PK Kelkar Library, IIT Kanpur
General Stacks 621.38152 R275h (Browse shelf) Available A171313
Total holds: 0

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