| 000 -LEADER |
|---|
| fixed length control field |
00596pam a2200169a 44500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
160408b2011 xxu||||| |||| 00| 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
9780470625958 |
| 040 ## - CATALOGING SOURCE |
|---|
| Original cataloging agency |
IIT, Kanpur |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER |
|---|
| Classification number |
621.38152 |
| Item number |
R275h |
| 100 ## - MAIN ENTRY--PERSONAL NAME |
|---|
| Personal name |
Reinhardt, Karen A. |
| 245 0# - TITLE STATEMENT |
|---|
| Title |
Handbook of cleaning for semiconductor manufacturing |
| Remainder of title |
fundamentals and applications |
| Statement of responsibility, etc. |
Karen A. Reinhardt and Richard F. Reidy |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. |
|---|
| Place of publication, distribution, etc. |
New Jersey |
| Name of publisher, distributor, etc. |
John Wiley & Sons |
| Date of publication, distribution, etc. |
2011 |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
xxii, 590p |
| 630 #0 - SUBJECT ADDED ENTRY--UNIFORM TITLE |
|---|
| Uniform title |
Semiconductors |
| -- |
Optoelectronics |
| 700 ## - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Reidy, Richard F. |
| 997 ## - |
|---|
| -- |
A171313 C |
