621.38152 / R275h
Reinhardt, Karen A.
Handbook of cleaning for semiconductor manufacturing : fundamentals and applications / Karen A. Reinhardt and Richard F. Reidy .- New Jersey: John Wiley & Sons, 2011 .- xxii, 590p .
ISBN: 9780470625958
Semiconductors
Optoelectronics
Author Added Entry:
Reidy, Richard F.;
Copy Details:
Acc. No.: A171313, Full Call No.: 621.38152 R275h, Item type: Books , Location: General Stacks,
------------------------- --------------------- ------ --------- ------- ------- --------- --------
Reinhardt, Karen A.
Handbook of cleaning for semiconductor manufacturing : fundamentals and applications / Karen A. Reinhardt and Richard F. Reidy .- New Jersey: John Wiley & Sons, 2011 .- xxii, 590p .
ISBN: 9780470625958
Semiconductors
Optoelectronics
Author Added Entry:
Reidy, Richard F.;
Copy Details:
Acc. No.: A171313, Full Call No.: 621.38152 R275h, Item type: Books , Location: General Stacks,
------------------------- --------------------- ------ --------- ------- ------- --------- --------