Micro and Nano Fabrication [perpetual] : tools and processes
By: Gatzen, Hans H.
Contributor(s): Saile, Volker | Leuthold, Jürg.
Publisher: New York Springer 2015Description: xxvi, 537p.ISBN: 9783662443958.Subject(s): Microelectromechanical systems | MicrofabricationDDC classification: 620.5 | G229m Online resources: Click here to access online Summary: For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.| Item type | Current location | Collection | Call number | Status | Date due | Barcode | Item holds |
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E books
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PK Kelkar Library, IIT Kanpur | Electronic Resources | 620.5 G229m (Browse shelf) | Available | EBK10678 |
Total holds: 0
For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.
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