| 000 -LEADER |
|---|
| fixed length control field |
01181 a2200253 4500 |
| 003 - CONTROL NUMBER IDENTIFIER |
|---|
| control field |
OSt |
| 005 - DATE AND TIME OF LATEST TRANSACTION |
|---|
| control field |
20210706131116.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
210204b xxu||||| |||| 00| 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| ISBN |
9783662443958 |
| 040 ## - CATALOGING SOURCE |
|---|
| Transcribing agency |
IIT Kanpur |
| 041 ## - LANGUAGE CODE |
|---|
| Language code of text/sound track or separate title |
eng |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER |
|---|
| Classification number |
620.5 |
| Item number |
G229m |
| 100 ## - MAIN ENTRY--AUTHOR NAME |
|---|
| Personal name |
Gatzen, Hans H. |
| 245 ## - TITLE STATEMENT |
|---|
| Title |
Micro and Nano Fabrication [perpetual] |
| Remainder of title |
tools and processes |
| Statement of responsibility, etc |
Hans H. Gatzen, Volker Saile and Jurg Leuthold |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) |
|---|
| Name of publisher |
Springer |
| Year of publication |
2015 |
| Place of publication |
New York |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Number of Pages |
xxvi, 537p. |
| 520 ## - SUMMARY, ETC. |
|---|
| Summary, etc |
For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control. |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical Term |
Microelectromechanical systems |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical Term |
Microfabrication |
| 700 ## - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Saile, Volker |
| 700 ## - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Leuthold, Jürg |
| 856 ## - ELECTRONIC LOCATION AND ACCESS |
|---|
| Uniform Resource Identifier |
https://link.springer.com/book/10.1007/978-3-662-44395-8 |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) |
|---|
| Koha item type |
E books |
