620.5 / G229m
Gatzen, Hans H.
Micro and Nano Fabrication [perpetual] : tools and processes / Hans H. Gatzen, Volker Saile and Jurg Leuthold .- New York: Springer, 2015 .- xxvi, 537p..
ISBN: 9783662443958
Subject Headings:
Microelectromechanical systems;
Microfabrication;
Author Added Entry:
Saile, Volker;
Leuthold, Jürg;
Copy Details:
Acc. No.: EBK10678, Full Call No.: 620.5 G229m, Item type: E books , Location: Electronic Resources,
------------------------- --------------------- ------ --------- ------- ------- --------- --------
Gatzen, Hans H.
Micro and Nano Fabrication [perpetual] : tools and processes / Hans H. Gatzen, Volker Saile and Jurg Leuthold .- New York: Springer, 2015 .- xxvi, 537p..
ISBN: 9783662443958
Subject Headings:
Microelectromechanical systems;
Microfabrication;
Author Added Entry:
Saile, Volker;
Leuthold, Jürg;
Copy Details:
Acc. No.: EBK10678, Full Call No.: 620.5 G229m, Item type: E books , Location: Electronic Resources,
------------------------- --------------------- ------ --------- ------- ------- --------- --------