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Characterization and Metrology for ULSI Technology

By: International Conference on Characterization and Metrology for ULSI Technology Richardson, Texas 2005.
Contributor(s): Seiler, David G.(Ed.) | .
Series: AIP conference proceedings.Publisher: New York American Institute Of Physics,New York 2005Description: xx, 667p.ISBN: 0735402779.Subject(s): MetrologyDDC classification: 621.395 | In8c
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Item type Current location Collection Call number url Status Date due Barcode Item holds
Books Books PK Kelkar Library, IIT Kanpur
COMPACT STORAGE (BASEMENT) 621.395 In8c (Browse shelf) Book Request Available A161303
Total holds: 0

Includes bibliographical references and index.

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