621.395 / In8c
Characterization and Metrology for ULSI Technology / editors, David G. Seiler ... [et al.] .- New York: American Institute Of Physics,New York, 2005 .- xx, 667p.. ** AIP conference proceedings ) - AIP conference proceedings ; v. no.788. .
Includes bibliographical references and index.
ISBN: 0735402779
Subject Headings:
Metrology;
Author Added Entry:
Seiler, David G.(Ed.);
;
Copy Details:
Acc. No.: A161303, Full Call No.: 621.395 In8c, Item type: Books , Location: COMPACT STORAGE (BASEMENT),
------------------------- --------------------- ------ --------- ------- ------- --------- --------
Characterization and Metrology for ULSI Technology / editors, David G. Seiler ... [et al.] .- New York: American Institute Of Physics,New York, 2005 .- xx, 667p.. ** AIP conference proceedings ) - AIP conference proceedings ; v. no.788. .
Includes bibliographical references and index.
ISBN: 0735402779
Subject Headings:
Metrology;
Author Added Entry:
Seiler, David G.(Ed.);
;
Copy Details:
Acc. No.: A161303, Full Call No.: 621.395 In8c, Item type: Books , Location: COMPACT STORAGE (BASEMENT),
------------------------- --------------------- ------ --------- ------- ------- --------- --------