| 000 -LEADER |
|---|
| fixed length control field |
00725 a2200205 4500 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
0735402779 |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER |
|---|
| Classification number |
621.395 |
| Item number |
In8c |
| 111 ## - MAIN ENTRY--MEETING NAME |
|---|
| Meeting name or jurisdiction name as entry element |
International Conference on Characterization and Metrology for ULSI Technology |
| Location of meeting |
Richardson, Texas |
| Date of meeting |
2005 |
| 245 1# - TITLE STATEMENT |
|---|
| Title |
Characterization and Metrology for ULSI Technology |
| Statement of responsibility, etc. |
editors, David G. Seiler ... [et al.] |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. |
|---|
| Place of publication, distribution, etc. |
New York |
| Name of publisher, distributor, etc. |
American Institute Of Physics,New York |
| Date of publication, distribution, etc. |
2005 |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
xx, 667p. |
| 490 ## - SERIES STATEMENT |
|---|
| Series statement |
AIP conference proceedings |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE |
|---|
| Bibliography, etc. note |
Includes bibliographical references and index. |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Metrology |
| 700 ## - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Seiler, David G.(Ed.) |
| 700 ## - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
|
| 830 ## - SERIES ADDED ENTRY--UNIFORM TITLE |
|---|
| Uniform title |
AIP conference proceedings ; |
| 830 ## - SERIES ADDED ENTRY--UNIFORM TITLE |
|---|
| Volume/sequential designation |
v. no.788. |
| 997 ## - |
|---|
| -- |
A161303 s C |
