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Sputtering materials for VLSI and thin film devices

By: Sarkar, Jaydeep.
Material type: materialTypeLabelBookPublisher: Amsterdam Elsevier 2014Description: x, 603p.ISBN: 9780815515937.Subject(s): Microelectronics -- Materials | Flat panel displays -- Materials | Sputtering (Physics)DDC classification: 621.381 | Sa73s
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Item type Current location Collection Call number url Status Date due Barcode Item holds
Books Books PK Kelkar Library, IIT Kanpur
COMPACT STORAGE (BASEMENT) 621.381 Sa73s (Browse shelf) Book Request Available A179496
Total holds: 0

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