621.381 / Sa73s
Sarkar, Jaydeep
Sputtering materials for VLSI and thin film devices / Jaydeep Sarkar .- Amsterdam: Elsevier, 2014 .- x, 603p .
ISBN: 9780815515937
Subject Headings:
Microelectronics -- Materials.;
Flat panel displays -- Materials.;
Sputtering (Physics);
Copy Details:
Acc. No.: A179496, Full Call No.: 621.381 Sa73s, Item type: Books , Location: COMPACT STORAGE (BASEMENT),
------------------------- --------------------- ------ --------- ------- ------- --------- --------
Sarkar, Jaydeep
Sputtering materials for VLSI and thin film devices / Jaydeep Sarkar .- Amsterdam: Elsevier, 2014 .- x, 603p .
ISBN: 9780815515937
Subject Headings:
Microelectronics -- Materials.;
Flat panel displays -- Materials.;
Sputtering (Physics);
Copy Details:
Acc. No.: A179496, Full Call No.: 621.381 Sa73s, Item type: Books , Location: COMPACT STORAGE (BASEMENT),
------------------------- --------------------- ------ --------- ------- ------- --------- --------