| 000 -LEADER |
|---|
| fixed length control field |
00572pam a2200181a 44500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
160408b2014 xxu||||| |||| 00| 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
9780815515937 |
| 040 ## - CATALOGING SOURCE |
|---|
| Original cataloging agency |
P K Kelkar Library, IIT Kanpur |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER |
|---|
| Classification number |
621.381 |
| Item number |
Sa73s |
| 100 ## - MAIN ENTRY--PERSONAL NAME |
|---|
| Personal name |
Sarkar, Jaydeep |
| 245 0# - TITLE STATEMENT |
|---|
| Title |
Sputtering materials for VLSI and thin film devices |
| Statement of responsibility, etc. |
Jaydeep Sarkar |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. |
|---|
| Place of publication, distribution, etc. |
Amsterdam |
| Name of publisher, distributor, etc. |
Elsevier |
| Date of publication, distribution, etc. |
2014 |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
x, 603p |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Microelectronics -- Materials. |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Flat panel displays -- Materials. |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Sputtering (Physics) |
| 997 ## - |
|---|
| -- |
A179496 s C |
