Fundamentals of microfabrication and nanotechnology [3 vol.] [3rd ed.]
By: Madou, Marc J.
Material type:
BookPublisher: Boca Raton CRC Press 2012Edition: 3rd ed.Description: 3v. (various pagings).ISBN: 9780849331800.Subject(s): Microelectronics -- Design and constructionDDC classification: 621.38152 | M266f3
Contents:
Contents: v.1 -- Solid-state physics, fluidics, and analytical techniques in micro and nanotechnology. v.2 -- Manufacturing techniques for microfabrication and nanotechnology. v.3 -- From MEMS to Bio-MEMS and Bio-MEMS.
| Item type | Current location | Collection | Call number | Vol info | url | Copy number | Status | Date due | Barcode | Item holds |
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Text Books
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PK Kelkar Library, IIT Kanpur | TEXT | 621.38152 M266f3 v.3 cop.2 (Browse shelf) | v.3. From MEMS to Bio-MEMS and Bio-Nems, Manufacturaing techniques and applications | Copy 2 | Available | A172487 | |||
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Text Books
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PK Kelkar Library, IIT Kanpur | TEXT | 621.38152 M266f3 v.1 cop.1 (Browse shelf) | v.1. Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology | Copy 1 | Available | A172482 | |||
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Text Books
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PK Kelkar Library, IIT Kanpur | TEXT | 621.38152 M266f3 v.1 cop.2 (Browse shelf) | v.1. Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology | Copy 2 | Available | A172485 | |||
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Text Books
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PK Kelkar Library, IIT Kanpur | TEXT | 621.38152 M266f3 v.2 cop.1 (Browse shelf) | v.2. Manufacturing techniques for microfabrication and nanotechnology | Copy 1 | Available | A172483 | |||
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Text Books
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PK Kelkar Library, IIT Kanpur | TEXT | 621.38152 M266f3 v.2 cop.2 (Browse shelf) | v.2. Manufacturing techniques for microfabrication and nanotechnology | Copy 2 | Available | A172486 | |||
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Text Books
|
PK Kelkar Library, IIT Kanpur | TEXT | 621.38152 M266f3 v.3 cop.1 (Browse shelf) | v.3. From MEMS to Bio-MEMS and Bio-Nems, Manufacturaing techniques and applications | Copy 1 | Available | A172484 |
Total holds: 0
Browsing PK Kelkar Library, IIT Kanpur Shelves , Collection code: TEXT Close shelf browser
| 621.38152 D954s cop.9 Semiconductor devices and circuits | 621.38152 El25 Electronic structure of metal-semiconductor contacts | 621.38152 G344s Semiconductor devices for high-speed optoelectronics | 621.38152 M266f3 v.1 cop.1 Fundamentals of microfabrication and nanotechnology [3 vol.] [3rd ed.] | 621.38152 M266f3 v.1 cop.2 Fundamentals of microfabrication and nanotechnology [3 vol.] [3rd ed.] | 621.38152 M266f3 v.2 cop.1 Fundamentals of microfabrication and nanotechnology [3 vol.] [3rd ed.] | 621.38152 M266f3 v.2 cop.2 Fundamentals of microfabrication and nanotechnology [3 vol.] [3rd ed.] |
Contents: v.1 -- Solid-state physics, fluidics, and analytical techniques in micro and nanotechnology. v.2 -- Manufacturing techniques for microfabrication and nanotechnology. v.3 -- From MEMS to Bio-MEMS and Bio-MEMS.
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