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Fundamentals of microfabrication and nanotechnology [3 vol.] [3rd ed.] (Record no. 369650)

000 -LEADER
fixed length control field 00819pam a2200217a 44500
003 - CONTROL NUMBER IDENTIFIER
control field OSt
005 - DATE AND TIME OF LATEST TRANSACTION
control field 20240530105726.0
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION
fixed length control field 160408b2012 xxu||||| |||| 00| 0 eng d
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
ISBN 9780849331800
040 ## - CATALOGING SOURCE
Transcribing agency IIT Kanpur
041 ## - LANGUAGE CODE
Language code of text/sound track or separate title eng
082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER
Classification number 621.38152
Item number M266f3
100 ## - MAIN ENTRY--AUTHOR NAME
Personal name Madou, Marc J.
245 0# - TITLE STATEMENT
Title Fundamentals of microfabrication and nanotechnology [3 vol.] [3rd ed.]
Statement of responsibility, etc Marc J. Madou
250 ## - EDITION STATEMENT
Edition statement 3rd ed.
260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT)
Place of publication Boca Raton
Name of publisher CRC Press
Year of publication 2012
300 ## - PHYSICAL DESCRIPTION
Number of Pages 3v. (various pagings)
505 ## - FORMATTED CONTENTS NOTE
Formatted contents note Contents: v.1 -- Solid-state physics, fluidics, and analytical techniques in micro and nanotechnology. v.2 -- Manufacturing techniques for microfabrication and nanotechnology. v.3 -- From MEMS to Bio-MEMS and Bio-MEMS.
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical Term Microelectronics -- Design and construction
942 ## - ADDED ENTRY ELEMENTS (KOHA)
Koha item type Books
Holdings
Withdrawn status Lost status Damaged status Not for loan Collection code Permanent Location Current Location Date acquired Source of acquisition Cost, normal purchase price Serial Enumeration / chronology Full call number Accession Number Copy number Uniform Resource Identifier Koha item type
        TEXT PK Kelkar Library, IIT Kanpur PK Kelkar Library, IIT Kanpur 2011-12-09 International Book Agency 3987.72 v.3. From MEMS to Bio-MEMS and Bio-Nems, Manufacturaing techniques and applications 621.38152 M266f3 v.3 cop.2 A172487 Copy 2 Text Books
        TEXT PK Kelkar Library, IIT Kanpur PK Kelkar Library, IIT Kanpur 2011-12-09 International Book Agency 3987.72 v.2. Manufacturing techniques for microfabrication and nanotechnology 621.38152 M266f3 v.2 cop.2 A172486 Copy 2 Text Books
        TEXT PK Kelkar Library, IIT Kanpur PK Kelkar Library, IIT Kanpur 2011-12-09 International Book Agency 3987.72 v.1. Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology 621.38152 M266f3 v.1 cop.2 A172485 Copy 2 Text Books
        TEXT PK Kelkar Library, IIT Kanpur PK Kelkar Library, IIT Kanpur 2011-12-09 International Book Agency 3987.72 v.3. From MEMS to Bio-MEMS and Bio-Nems, Manufacturaing techniques and applications 621.38152 M266f3 v.3 cop.1 A172484 Copy 1 Text Books
        TEXT PK Kelkar Library, IIT Kanpur PK Kelkar Library, IIT Kanpur 2011-12-09 International Book Agency 3987.72 v.2. Manufacturing techniques for microfabrication and nanotechnology 621.38152 M266f3 v.2 cop.1 A172483 Copy 1 Text Books
        TEXT PK Kelkar Library, IIT Kanpur PK Kelkar Library, IIT Kanpur 2011-12-09 International Book Agency 3987.72 v.1. Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology 621.38152 M266f3 v.1 cop.1 A172482 Copy 1 Text Books

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