Nanoparticle engineering for chemical-mechanical planarization : fabrication of next-generation nanodevices
By: Paik, Ungyu.
Contributor(s): Park, Jea-Gun.
Material type:
BookPublisher: Boca Raton Crc Press 2009Description: xiii, 191p.ISBN: 9781420059113.Subject(s): Chemical mechanical planarizationDDC classification: 621.38152 | P153n
| Item type | Current location | Collection | Call number | url | Status | Date due | Barcode | Item holds |
|---|---|---|---|---|---|---|---|---|
Books
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PK Kelkar Library, IIT Kanpur | COMPACT STORAGE (BASEMENT) | 621.38152 P153n (Browse shelf) | Book Request | Available | A165392 |
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| 621.38152 N811n NONDESTRUCTIVE EVALUATION OF SEMICONDUCTOR MATERIALS AND DEVICES | 621.38152 Ox3 Oxide semiconductors | 621.38152 P12 PACKAGING OF POWER SEMICONDUCTOR DEVICES | 621.38152 P153n Nanoparticle engineering for chemical-mechanical planarization | 621.38152 P539 SEMICONDUCTORS AND INTEGRATED CIRCUITS | 621.38152 P539 SEMICONDUCTORS AND INTEGRATED CIRCUITS | 621.38152 P539 SEMICONDUCTORS AND INTEGRATED CIRCUITS |
Includes bibliographical references and index.
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