621.38152 / P153n
Paik, Ungyu
Nanoparticle engineering for chemical-mechanical planarization : fabrication of next-generation nanodevices / Ungyu Paik and Jea-Gun Park .- Boca Raton: Crc Press, 2009 .- xiii, 191p .
Includes bibliographical references and index.
ISBN: 9781420059113
Subject Headings:
Chemical mechanical planarization.;
Author Added Entry:
Park, Jea-Gun;
Copy Details:
Acc. No.: A165392, Full Call No.: 621.38152 P153n, Item type: Books , Location: COMPACT STORAGE (BASEMENT),
------------------------- --------------------- ------ --------- ------- ------- --------- --------
Paik, Ungyu
Nanoparticle engineering for chemical-mechanical planarization : fabrication of next-generation nanodevices / Ungyu Paik and Jea-Gun Park .- Boca Raton: Crc Press, 2009 .- xiii, 191p .
Includes bibliographical references and index.
ISBN: 9781420059113
Subject Headings:
Chemical mechanical planarization.;
Author Added Entry:
Park, Jea-Gun;
Copy Details:
Acc. No.: A165392, Full Call No.: 621.38152 P153n, Item type: Books , Location: COMPACT STORAGE (BASEMENT),
------------------------- --------------------- ------ --------- ------- ------- --------- --------