| 000 -LEADER |
|---|
| fixed length control field |
00654pam a2200181a 44500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
160408b2009 xxu||||| |||| 00| 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
9781420059113 |
| 040 ## - CATALOGING SOURCE |
|---|
| Original cataloging agency |
IIT, Kanpur |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER |
|---|
| Classification number |
621.38152 |
| Item number |
P153n |
| 100 ## - MAIN ENTRY--PERSONAL NAME |
|---|
| Personal name |
Paik, Ungyu |
| 245 ## - TITLE STATEMENT |
|---|
| Title |
Nanoparticle engineering for chemical-mechanical planarization |
| Remainder of title |
fabrication of next-generation nanodevices |
| Statement of responsibility, etc. |
Ungyu Paik and Jea-Gun Park |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. |
|---|
| Place of publication, distribution, etc. |
Boca Raton |
| Name of publisher, distributor, etc. |
Crc Press |
| Date of publication, distribution, etc. |
2009 |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
xiii, 191p |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE |
|---|
| Bibliography, etc. note |
Includes bibliographical references and index. |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Chemical mechanical planarization. |
| 700 ## - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Park, Jea-Gun |
| 997 ## - |
|---|
| -- |
A165392 s C |
