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HANDBOOK OF MICROLITHOGRAPHY, MICROMACHINING, AND MICROFABRICATION : MICROMACHINING AND MICROFABRICATION

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BookPublisher: Bellingham Spie-Optical Engineering Press 1997Description: viii, 692p.ISBN: 0852969112.Subject(s): Microlithography | Micromachining | MicrofabricationDDC classification: 670 | H192r

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Item type	Current location	Collection	Call number	Status	Date due	Barcode	Item holds
Books	PK Kelkar Library, IIT Kanpur	General Stacks	670 H192R (Browse shelf)	Available		A126117

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Includes Bibliographical References And Index

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