HANDBOOK OF MICROLITHOGRAPHY, MICROMACHINING, AND MICROFABRICATION : MICROMACHINING AND MICROFABRICATION
Contributor(s): Rai-Choudhury, P. [ed.].
Material type: BookPublisher: Bellingham Spie-Optical Engineering Press 1997Description: viii, 692p.ISBN: 0852969112.Subject(s): Microlithography | Micromachining | MicrofabricationDDC classification: 670 | H192rItem type | Current location | Collection | Call number | Status | Date due | Barcode | Item holds |
---|---|---|---|---|---|---|---|
Books | PK Kelkar Library, IIT Kanpur | General Stacks | 670 H192R (Browse shelf) | Available | A126117 |
Total holds: 0
Includes Bibliographical References And Index
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