| 000 -LEADER |
|---|
| fixed length control field |
00665pam a2200205a 44500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
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| fixed length control field |
160408bc1997 xxu||||| |||| 00| 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| ISBN |
0852969112 |
| 040 ## - CATALOGING SOURCE |
|---|
| Transcribing agency |
IITK |
| 041 ## - LANGUAGE CODE |
|---|
| Language code of text/sound track or separate title |
eng |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER |
|---|
| Classification number |
670 |
| Item number |
H192r |
| 245 1# - TITLE STATEMENT |
|---|
| Title |
HANDBOOK OF MICROLITHOGRAPHY, MICROMACHINING, AND MICROFABRICATION |
| Statement of responsibility, etc |
edited by P. Rai-Choudhury |
| Remainder of title |
MICROMACHINING AND MICROFABRICATION |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) |
|---|
| Name of publisher |
Spie-Optical Engineering Press |
| Year of publication |
1997 |
| Place of publication |
Bellingham |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Number of Pages |
viii, 692p |
| 500 ## - GENERAL NOTE |
|---|
| General note |
Includes Bibliographical References And Index |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical Term |
Microlithography |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical Term |
Micromachining |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical Term |
Microfabrication |
| 700 ## - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Rai-Choudhury, P. [ed.] |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) |
|---|
| Koha item type |
Books |
