ELECTRON-BEAM TECHNOLOGY IN MICROELECTRONIC FABRICATION
By: Brewer, George Raymond.
Material type:
BookPublisher: New York Academic 1980Description: xi,362.Subject(s): Microelectronics | Lithography, Electron BeamDDC classification: 621.3817 | EL25t
| Item type | Current location | Collection | Call number | Status | Date due | Barcode | Item holds |
|---|---|---|---|---|---|---|---|
Books
|
PK Kelkar Library, IIT Kanpur | General Stacks | 621.3817 EL25t (Browse shelf) | Available | A65420 |
Total holds: 0
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