621.3817 / EL25t
Brewer, George Raymond
ELECTRON-BEAM TECHNOLOGY IN MICROELECTRONIC FABRICATION / .- New York: Academic, 1980 .- xi,362 .
Subject Headings:
Microelectronics;
Lithography, Electron Beam;
Copy Details:
Acc. No.: A65420, Full Call No.: 621.3817 EL25t, Item type: Books , Location: General Stacks,
------------------------- --------------------- ------ --------- ------- ------- --------- --------
Brewer, George Raymond
ELECTRON-BEAM TECHNOLOGY IN MICROELECTRONIC FABRICATION / .- New York: Academic, 1980 .- xi,362 .
Subject Headings:
Microelectronics;
Lithography, Electron Beam;
Copy Details:
Acc. No.: A65420, Full Call No.: 621.3817 EL25t, Item type: Books , Location: General Stacks,
------------------------- --------------------- ------ --------- ------- ------- --------- --------