| 000 -LEADER |
|---|
| fixed length control field |
00442pam a2200157a 44500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
160408b1980 xxu||||| |||| 00| 0 eng d |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER |
|---|
| Classification number |
621.3817 |
| Item number |
EL25t |
| 100 ## - MAIN ENTRY--PERSONAL NAME |
|---|
| Personal name |
Brewer, George Raymond |
| 245 1# - TITLE STATEMENT |
|---|
| Title |
ELECTRON-BEAM TECHNOLOGY IN MICROELECTRONIC FABRICATION |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. |
|---|
| Place of publication, distribution, etc. |
New York |
| Name of publisher, distributor, etc. |
Academic |
| Date of publication, distribution, etc. |
1980 |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
xi,362 |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Microelectronics |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Lithography, Electron Beam |
| 964 ## - |
|---|
| -- |
CIRC |
| 997 ## - |
|---|
| -- |
A65420 C |
