| 000 -LEADER |
|---|
| fixed length control field |
01485 a2200253 4500 |
| 003 - CONTROL NUMBER IDENTIFIER |
|---|
| control field |
OSt |
| 005 - DATE AND TIME OF LATEST TRANSACTION |
|---|
| control field |
20211216162649.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
211216b xxu||||| |||| 00| 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| ISBN |
9783030405588 |
| 040 ## - CATALOGING SOURCE |
|---|
| Transcribing agency |
IIT Kanpur |
| 041 ## - LANGUAGE CODE |
|---|
| Language code of text/sound track or separate title |
eng |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER |
|---|
| Classification number |
621.381 |
| Item number |
H872p |
| 100 ## - MAIN ENTRY--AUTHOR NAME |
|---|
| Personal name |
Huff, Michael |
| 245 ## - TITLE STATEMENT |
|---|
| Title |
Process variations in microsystems manufacturing |
| Statement of responsibility, etc |
Michael Huff |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) |
|---|
| Name of publisher |
Springer |
| Year of publication |
2020 |
| Place of publication |
Switzerland |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Number of Pages |
xix, 521p |
| 440 ## - SERIES STATEMENT/ADDED ENTRY--TITLE |
|---|
| Title |
Microsystems and Nanosystems |
| 490 ## - SERIES STATEMENT |
|---|
| Series statement |
/ edited by Roger T. Howe |
| 520 ## - SUMMARY, ETC. |
|---|
| Summary, etc |
This book thoroughly examines and explains the basic processing steps used in MEMS fabrication (both integrated circuit and specialized micro machining processing steps. The book places an emphasis on the process variations in the device dimensions resulting from these commonly used processing steps. This will be followed by coverage of commonly used metrology methods, process integration and variations in material properties, device parameter variations, quality assurance and control methods, and design methods for handling process variations. A detailed analysis of future methods for improved microsystems manufacturing is also included. This book is a valuable resource for practitioners, researchers and engineers working in the field as well as students at either the undergraduate or graduate level. |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical Term |
Microelectromechanical systems |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical Term |
Manufactures |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical Term |
Nanotechnology |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) |
|---|
| Koha item type |
Books |
