621.381 / H872p
Huff, Michael
Process variations in microsystems manufacturing / Michael Huff .- Switzerland: Springer, 2020 .- xix, 521p. .- ( Microsystems and Nanosystems ** / edited by Roger T. Howe )
ISBN: 9783030405588
Subject Headings:
Microelectromechanical systems;
Manufactures;
Nanotechnology;
Copy Details:
Acc. No.: A185439, Full Call No.: 621.381 H872p, Item type: Books , Location: General Stacks,
------------------------- --------------------- ------ --------- ------- ------- --------- --------
Huff, Michael
Process variations in microsystems manufacturing / Michael Huff .- Switzerland: Springer, 2020 .- xix, 521p. .- ( Microsystems and Nanosystems ** / edited by Roger T. Howe )
ISBN: 9783030405588
Subject Headings:
Microelectromechanical systems;
Manufactures;
Nanotechnology;
Copy Details:
Acc. No.: A185439, Full Call No.: 621.381 H872p, Item type: Books , Location: General Stacks,
------------------------- --------------------- ------ --------- ------- ------- --------- --------