Welcome to P K Kelkar Library, Online Public Access Catalogue (OPAC)

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1. DRY ETCHING FOR MICROELECTRONICS

by Powell, Ronald A.

Material type: book Book; Format: print ; Literary form: not fiction Description: xi,299.Publisher: Amsterdam North-Holland 1984Availability: Items available for loan: PK Kelkar Library, IIT Kanpur [Call number: 621.3817 D847] (1).

2. DRY ETCHING FOR MICROELECTRONICS

by Powell, Ronald A.

Material type: book Book; Format: print ; Literary form: not fiction Description: xi,299.Publisher: Amsterdam North-Holland 1984Availability: Items available for loan: PK Kelkar Library, IIT Kanpur [Call number: 621.3817 D847] (1).

3. PLASMA ETCHING

by Sugawara,M.

Material type: book Book Description: viii,347.Publisher: Oxford Univ. Pr., Oxford c1998Availability: Items available for loan: PK Kelkar Library, IIT Kanpur [Call number: 621.381531 SU31P] (1).

4. Silicon processing for the VLSI ERA [v.2]

by Wolf, Stanley.

Material type: book Book; Format: print ; Literary form: not fiction Description: xxxvi, 890p.Publisher: California Lattice Press 2000Availability: Items available for loan: PK Kelkar Library, IIT Kanpur [Call number: 621.38173 W831s2] (1).

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