DRY ETCHING FOR MICROELECTRONICS
By: Powell, Ronald A.
Material type:
BookSeries: Materials Processing Theory And Practices V. 4. Publisher: Amsterdam North-Holland 1984Description: xi,299.Subject(s): Semiconductors -- Etching | MicroelectronicsDDC classification: 621.3817 | D847
| Item type | Current location | Collection | Call number | url | Status | Date due | Barcode | Item holds |
|---|---|---|---|---|---|---|---|---|
Books
|
PK Kelkar Library, IIT Kanpur | COMPACT STORAGE (BASEMENT) | 621.3817 D847 (Browse shelf) | Book Request | Available | A85124 |
Total holds: 0
Bibliography : P. 223-294
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