PLASMA DEPOSITION OF AMORPHOUS SILICON-BASED MATERIALS
By: Giovanni No Bruno,Pio No Capezzuto,Arun No Madan.
Contributor(s): Madan,Arun.
Material type: BookSeries: Plasma-Materials Interactions. Publisher: Academic Press, Boston 1995Description: xi,324.ISBN: 012137940X.Subject(s): Amorphous Semiconductors -- Design And Construction | Silicon Alloys | Plasma-Enhanced Chemical Vapor DepositionDDC classification: 621.38152 | P695Item type | Current location | Collection | Call number | Status | Date due | Barcode | Item holds |
---|---|---|---|---|---|---|---|
Books | PK Kelkar Library, IIT Kanpur | General Stacks | 621.38152 P695 (Browse shelf) | Available | A123102 |
Total holds: 0
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