| 000 -LEADER |
|---|
| fixed length control field |
00657pam a2200205a 44500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
160408b1995 xxu||||| |||| 00| 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
012137940X |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER |
|---|
| Classification number |
621.38152 |
| Item number |
P695 |
| 100 ## - MAIN ENTRY--PERSONAL NAME |
|---|
| Personal name |
Giovanni No Bruno,Pio No Capezzuto,Arun No Madan |
| 245 1# - TITLE STATEMENT |
|---|
| Title |
PLASMA DEPOSITION OF AMORPHOUS SILICON-BASED MATERIALS |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. |
|---|
| Place of publication, distribution, etc. |
|
| Name of publisher, distributor, etc. |
Academic Press, Boston |
| Date of publication, distribution, etc. |
1995 |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
xi,324 |
| 440 ## - SERIES STATEMENT/ADDED ENTRY--TITLE |
|---|
| Title |
Plasma-Materials Interactions |
| Volume/sequential designation |
|
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Amorphous Semiconductors -- Design And Construction |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Silicon Alloys |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Plasma-Enhanced Chemical Vapor Deposition |
| 700 ## - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Madan,Arun |
| 964 ## - |
|---|
| -- |
CIRC |
| 997 ## - |
|---|
| -- |
A123102 C |
