HIGH VACUUM PRODUCTION IN THE MICROELECTRONICS INDUSTRY
By: Duval, Pierre.
Material type:
BookSeries: Plasma Technology V. 2. Publisher: Amsterdam Elsevier 1988Description: xiii,222.ISBN: 044442878X.Subject(s): Vacuum Technology | MicroelectronicsDDC classification: 621.692 | D956h
| Item type | Current location | Collection | Call number | url | Status | Date due | Barcode | Item holds |
|---|---|---|---|---|---|---|---|---|
Books
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PK Kelkar Library, IIT Kanpur | COMPACT STORAGE (BASEMENT) | 621.692 D956h (Browse shelf) | Book Request | Available | A102341 |
Total holds: 0
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