621.692 / D956h
Duval, Pierre
HIGH VACUUM PRODUCTION IN THE MICROELECTRONICS INDUSTRY / .- Amsterdam: Elsevier, 1988 .- xiii,222 . .- ( Plasma Technology V. 2
ISBN: 044442878X
Subject Headings:
Vacuum Technology;
Microelectronics;
Copy Details:
Acc. No.: A102341, Full Call No.: 621.692 D956h, Item type: Books , Location: COMPACT STORAGE (BASEMENT),
------------------------- --------------------- ------ --------- ------- ------- --------- --------
Duval, Pierre
HIGH VACUUM PRODUCTION IN THE MICROELECTRONICS INDUSTRY / .- Amsterdam: Elsevier, 1988 .- xiii,222 . .- ( Plasma Technology V. 2
ISBN: 044442878X
Subject Headings:
Vacuum Technology;
Microelectronics;
Copy Details:
Acc. No.: A102341, Full Call No.: 621.692 D956h, Item type: Books , Location: COMPACT STORAGE (BASEMENT),
------------------------- --------------------- ------ --------- ------- ------- --------- --------