HANDBOOK OF ADVANCED PLASMA PROCESSING TECHNIQUES
By: R. J. Shul,S. J. Pearton.
Contributor(s): Pearton,S. J.
Material type: BookPublisher: Springer-Verlag, Berlin 2000Description: xvi,653.ISBN: 3540667725.Subject(s): Plasma Engineering | Electronic Circuits -- Design And Construction | Plasma EtchingDDC classification: 621.044 | H192SItem type | Current location | Collection | Call number | Status | Date due | Barcode | Item holds |
---|---|---|---|---|---|---|---|
Books | PK Kelkar Library, IIT Kanpur | General Stacks | 621.044 H192S (Browse shelf) | Available | A132279 |
Total holds: 0
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