621.044 / H192S
R. J. Shul,S. J. Pearton
HANDBOOK OF ADVANCED PLASMA PROCESSING TECHNIQUES / .- Springer-Verlag, Berlin, 2000 .- xvi,653 .
ISBN: 3540667725
Subject Headings:
Plasma Engineering;
Electronic Circuits -- Design And Construction;
Plasma Etching;
Author Added Entry:
Pearton,S. J.;
Copy Details:
Acc. No.: A132279, Full Call No.: 621.044 H192S, Item type: Books , Location: General Stacks,
------------------------- --------------------- ------ --------- ------- ------- --------- --------
R. J. Shul,S. J. Pearton
HANDBOOK OF ADVANCED PLASMA PROCESSING TECHNIQUES / .- Springer-Verlag, Berlin, 2000 .- xvi,653 .
ISBN: 3540667725
Subject Headings:
Plasma Engineering;
Electronic Circuits -- Design And Construction;
Plasma Etching;
Author Added Entry:
Pearton,S. J.;
Copy Details:
Acc. No.: A132279, Full Call No.: 621.044 H192S, Item type: Books , Location: General Stacks,
------------------------- --------------------- ------ --------- ------- ------- --------- --------