Optical lithography : here is why
By: Lin, Burn J.
Material type: BookPublisher: Washington Spie Press 2010Description: xiv, 477p.ISBN: 9780819475602.Subject(s): MicrolithographyDDC classification: 621.381531 | L63oItem type | Current location | Collection | Call number | Status | Date due | Barcode | Item holds |
---|---|---|---|---|---|---|---|
Books | PK Kelkar Library, IIT Kanpur | General Stacks | 621.381531 L63o (Browse shelf) | Available | A169582 |
Total holds: 0
Browsing PK Kelkar Library, IIT Kanpur Shelves , Collection code: General Stacks Close shelf browser
621.381531 H86m Modern semiconductor devices for integrated circuits | 621.381531 H86m Modern semiconductor devices for integrated circuits | 621.381531 H86m Modern semiconductor devices for integrated circuits | 621.381531 L63o Optical lithography | 621.381531 M769P2 PRINTED CIRCUIT BOARD DESIGN TECHNIQUES FOR EMC COMPLIANCE | 621.381531 N157 NANOLITHOGRAPHY AND PATTERNING TECHNIQUES IN MICROELECTRONICS | 621.381531 SU31P PLASMA ETCHING |
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