621.381531 / L63o
Lin, Burn J.
Optical lithography : here is why / Burn J. Lin .- Washington: Spie Press, 2010 .- xiv, 477p .
ISBN: 9780819475602
Subject Headings:
Microlithography;
Copy Details:
Acc. No.: A169582, Full Call No.: 621.381531 L63o, Item type: Books , Location: General Stacks,
------------------------- --------------------- ------ --------- ------- ------- --------- --------
Lin, Burn J.
Optical lithography : here is why / Burn J. Lin .- Washington: Spie Press, 2010 .- xiv, 477p .
ISBN: 9780819475602
Subject Headings:
Microlithography;
Copy Details:
Acc. No.: A169582, Full Call No.: 621.381531 L63o, Item type: Books , Location: General Stacks,
------------------------- --------------------- ------ --------- ------- ------- --------- --------