MATERIALS & PROCESS INTEGRATION FOR MEMS
By: F E H Tay,No.
Contributor(s): Tay,F E H.
Material type:
BookSeries: Microsystems V.9. Publisher: Kluwer Academic Publishers, Boston c2002Description: xix,299.ISBN: 1402071752.Subject(s): Microelectromechanical SystemsDDC classification: 621.381 | M418
| Item type | Current location | Collection | Call number | url | Status | Date due | Barcode | Item holds |
|---|---|---|---|---|---|---|---|---|
Books
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PK Kelkar Library, IIT Kanpur | COMPACT STORAGE (BASEMENT) | 621.381 M418 (Browse shelf) | Book Request | Available | A142644 |
Total holds: 0
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| 621.381 M367e ELECTRON BEAM AND LASER BEAM TECHNOLOGY | 621.381 M382a AGE OF ELECTRONICS | 621.381 M382a AGE OF ELECTRONICS | 621.381 M418 MATERIALS & PROCESS INTEGRATION FOR MEMS | 621.381 M436e ELECTRONICS | 621.381 M562e EFFECTS OF RADIATION ON ELECTRONIC SYSTEMS | 621.381 M583 MICROELECTRONICS PROCESSING |
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