621.381 / M418
F E H Tay,No
MATERIALS & PROCESS INTEGRATION FOR MEMS / .- Kluwer Academic Publishers, Boston, c2002 .- xix,299 . .- ( Microsystems V.9
ISBN: 1402071752
Subject Headings:
Microelectromechanical Systems;
Author Added Entry:
Tay,F E H;
Copy Details:
Acc. No.: A142644, Full Call No.: 621.381 M418, Item type: Books , Location: COMPACT STORAGE (BASEMENT),
------------------------- --------------------- ------ --------- ------- ------- --------- --------
F E H Tay,No
MATERIALS & PROCESS INTEGRATION FOR MEMS / .- Kluwer Academic Publishers, Boston, c2002 .- xix,299 . .- ( Microsystems V.9
ISBN: 1402071752
Subject Headings:
Microelectromechanical Systems;
Author Added Entry:
Tay,F E H;
Copy Details:
Acc. No.: A142644, Full Call No.: 621.381 M418, Item type: Books , Location: COMPACT STORAGE (BASEMENT),
------------------------- --------------------- ------ --------- ------- ------- --------- --------