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METAL IMPURITIES IN SILICON-DEVICE FABRICATION

By: Graff,Klaus.
Material type: materialTypeLabelBookPublisher: Springer-Verlag, Berlin 2000Edition: 2nd rev.Description: xv,268.ISBN: 3540642137.Subject(s): Semiconductors -- Defects | Silicon -- Defects | Silicon -- InclusionsDDC classification: 621.38152 | G758M2
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Item type Current location Collection Call number url Status Date due Barcode Item holds
Books Books PK Kelkar Library, IIT Kanpur
COMPACT STORAGE (BASEMENT) 621.38152 G758M2 (Browse shelf) Book Request Available A131369
Total holds: 0

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