| 000 -LEADER |
|---|
| fixed length control field |
00524pam a2200193a 44500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
160408b2000 xxu||||| |||| 00| 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
3540642137 |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER |
|---|
| Classification number |
621.38152 |
| Item number |
G758M2 |
| 100 ## - MAIN ENTRY--PERSONAL NAME |
|---|
| Personal name |
Graff,Klaus |
| 245 1# - TITLE STATEMENT |
|---|
| Title |
METAL IMPURITIES IN SILICON-DEVICE FABRICATION |
| 250 ## - EDITION STATEMENT |
|---|
| Edition statement |
2nd rev. |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. |
|---|
| Place of publication, distribution, etc. |
|
| Name of publisher, distributor, etc. |
Springer-Verlag, Berlin |
| Date of publication, distribution, etc. |
2000 |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
xv,268 |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Semiconductors -- Defects |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Silicon -- Defects |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Silicon -- Inclusions |
| 964 ## - |
|---|
| -- |
CIRC |
| 997 ## - |
|---|
| -- |
A131369 s C |
