HANDBOOK OF MICROLITHOGRAPHY, MICROMACHINING, AND MICROFABRICATION : MICROLITHOGRAPHY
Contributor(s): Rai-Choudhury, P. [ed.].
Material type:
BookPublisher: Bellingham Spie-Optical Engineering Press 1997Description: vii, 768p.ISBN: 0852969066.Subject(s): Microlithography | Micromachining | MicrofabricationDDC classification: 670 | H192r
| Item type | Current location | Collection | Call number | Status | Date due | Barcode | Item holds |
|---|---|---|---|---|---|---|---|
Books
|
PK Kelkar Library, IIT Kanpur | General Stacks | 670 H192R (Browse shelf) | Available | A126116 |
Total holds: 0
Includes Bibliographical References And Index
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