000 -LEADER |
fixed length control field |
00645pam a2200205a 44500 |
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
fixed length control field |
160408bc1997 xxu||||| |||| 00| 0 eng d |
020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
ISBN |
0852969066 |
040 ## - CATALOGING SOURCE |
Transcribing agency |
IITK |
041 ## - LANGUAGE CODE |
Language code of text/sound track or separate title |
eng |
082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER |
Classification number |
670 |
Item number |
H192r |
245 1# - TITLE STATEMENT |
Title |
HANDBOOK OF MICROLITHOGRAPHY, MICROMACHINING, AND MICROFABRICATION |
Statement of responsibility, etc |
edited by P. Rai-Choudhury |
Remainder of title |
MICROLITHOGRAPHY |
260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) |
Name of publisher |
Spie-Optical Engineering Press |
Year of publication |
1997 |
Place of publication |
Bellingham |
300 ## - PHYSICAL DESCRIPTION |
Number of Pages |
vii, 768p |
500 ## - GENERAL NOTE |
General note |
Includes Bibliographical References And Index |
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
Topical Term |
Microlithography |
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
Topical Term |
Micromachining |
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
Topical Term |
Microfabrication |
700 ## - ADDED ENTRY--PERSONAL NAME |
Personal name |
Rai-Choudhury, P. [ed.] |
942 ## - ADDED ENTRY ELEMENTS (KOHA) |
Koha item type |
Books |