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PLASMA DEPOSITION OF AMORPHOUS SILICON-BASED MATERIALS

By: Giovanni No Bruno,Pio No Capezzuto,Arun No Madan.
Contributor(s): Madan,Arun.
Material type: materialTypeLabelBookSeries: Plasma-Materials Interactions. Publisher: Academic Press, Boston 1995Description: xi,324.ISBN: 012137940X.Subject(s): Amorphous Semiconductors -- Design And Construction | Silicon Alloys | Plasma-Enhanced Chemical Vapor DepositionDDC classification: 621.38152 | P695
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Item type Current location Collection Call number Status Date due Barcode Item holds
Books Books PK Kelkar Library, IIT Kanpur
General Stacks 621.38152 P695 (Browse shelf) Available A123102
Total holds: 0

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