MODELLING OF FILM DEPOSITION FOR MICROELECTRONIC APPLICATIONS
By: Stephen Rossnagel.
Contributor(s): Rossnagel,Stephen.
Material type: BookSeries: Thin Films V.22. Publisher: Academic Press, San Diego c1996Description: xiv,291.ISBN: 0125330227.Subject(s): Surfaces (Technology)DDC classification: 530.4175 | M72RItem type | Current location | Collection | Call number | url | Status | Date due | Barcode | Item holds |
---|---|---|---|---|---|---|---|---|
Books | PK Kelkar Library, IIT Kanpur | COMPACT STORAGE (BASEMENT) | 530.4175 M72R (Browse shelf) | Book Request | Available | A122746 |
Total holds: 0
Includes Bibliographical References And Index
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