530.4175 / M72R
Stephen Rossnagel
MODELLING OF FILM DEPOSITION FOR MICROELECTRONIC APPLICATIONS / .- Academic Press, San Diego, c1996 .- xiv,291 . .- ( Thin Films V.22
Includes Bibliographical References And Index
ISBN: 0125330227
Subject Headings:
Surfaces (Technology);
Author Added Entry:
Rossnagel,Stephen;
Copy Details:
Acc. No.: A122746, Full Call No.: 530.4175 M72R, Item type: Books , Location: COMPACT STORAGE (BASEMENT),
------------------------- --------------------- ------ --------- ------- ------- --------- --------
Stephen Rossnagel
MODELLING OF FILM DEPOSITION FOR MICROELECTRONIC APPLICATIONS / .- Academic Press, San Diego, c1996 .- xiv,291 . .- ( Thin Films V.22
Includes Bibliographical References And Index
ISBN: 0125330227
Subject Headings:
Surfaces (Technology);
Author Added Entry:
Rossnagel,Stephen;
Copy Details:
Acc. No.: A122746, Full Call No.: 530.4175 M72R, Item type: Books , Location: COMPACT STORAGE (BASEMENT),
------------------------- --------------------- ------ --------- ------- ------- --------- --------