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HIGH VACUUM PRODUCTION IN THE MICROELECTRONICS INDUSTRY

By: Duval, Pierre.
Material type: materialTypeLabelBookSeries: Plasma Technology V. 2. Publisher: Amsterdam Elsevier 1988Description: xiii,222.ISBN: 044442878X.Subject(s): Vacuum Technology | MicroelectronicsDDC classification: 621.692 | D956h
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Item type Current location Collection Call number url Status Date due Barcode Item holds
Books Books PK Kelkar Library, IIT Kanpur
COMPACT STORAGE (BASEMENT) 621.692 D956h (Browse shelf) Book Request Available A102341
Total holds: 0

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