| 000 -LEADER |
|---|
| fixed length control field |
00525pam a2200181a 44500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
160408b1984 xxu||||| |||| 00| 0 eng d |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER |
|---|
| Classification number |
621.3817 |
| Item number |
D847 |
| 100 ## - MAIN ENTRY--PERSONAL NAME |
|---|
| Personal name |
Powell, Ronald A. |
| 245 1# - TITLE STATEMENT |
|---|
| Title |
DRY ETCHING FOR MICROELECTRONICS |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. |
|---|
| Place of publication, distribution, etc. |
Amsterdam |
| Name of publisher, distributor, etc. |
North-Holland |
| Date of publication, distribution, etc. |
1984 |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
xi,299 |
| 440 ## - SERIES STATEMENT/ADDED ENTRY--TITLE |
|---|
| Title |
Materials Processing Theory And Practices |
| Volume/sequential designation |
V. 4 |
| 500 ## - GENERAL NOTE |
|---|
| General note |
Bibliography : P. 223-294 |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Semiconductors -- Etching |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Microelectronics |
| 964 ## - |
|---|
| -- |
CIRC |
| 997 ## - |
|---|
| -- |
A85124 s C |
