| 000 -LEADER |
|---|
| fixed length control field |
00849 a2200241 4500 |
| 005 - DATE AND TIME OF LATEST TRANSACTION |
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| control field |
20170508151700.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
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| fixed length control field |
170508b xxu||||| |||| 00| 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| ISBN |
1566772001 |
| 040 ## - CATALOGING SOURCE |
|---|
| Transcribing agency |
IITK |
| 041 ## - LANGUAGE CODE |
|---|
| Language code of text/sound track or separate title |
eng |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER |
|---|
| Classification number |
621.395 |
| Item number |
Sy68e |
| 245 1# - TITLE STATEMENT |
|---|
| Title |
ELECTROCHEMICAL PROCESSING IN ULSI FABRICATION I AND INTERCONNECT AND CONTACT METALLIZATION |
| Remainder of title |
proceedingsd... |
| Statement of responsibility, etc |
edited by P. C. Andricacos [et al.] |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) |
|---|
| Place of publication |
New Jersey |
| Name of publisher |
Electrochemical Society |
| Year of publication |
1999 |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Number of Pages |
viii, 274p |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical Term |
Semiconductors -- Design and construction -- Congresses |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical Term |
Integrated Circuits -- Design and construction -- Congresses |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical Term |
Electrochemistry -- Congresses |
| 700 ## - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Andricacos, P.C. [ed.] |
| 700 ## - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Dukovic, J. O. [ed.] |
| 700 ## - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Mathad, G. S. [ed.] |
| 700 ## - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Oleszek, G. M. [ed.] |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) |
|---|
| Koha item type |
Books |
